Energy conservation measures for industrial facilities: eleven energy conservation measures...

The environmental impacts, the depletion of resources, and the costs associated with producing energy is of growing concern to the global semiconductor industry. This concern is driven by several factors such as the rising utility costs, nonrenewable source depletion, pollution, and efforts to reduce carbon dioxide emissions.

There are numerous areas in a semiconductor fabrication plant (commonly called "Fab" in the industry) where implementing energy efficient design, construction, and operation options can result in significant resource and cost savings. Opportunities