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Consortium to produce wafers patterned by x-rays.(Electronics)

A consortium has been established to promote the fabrication of large-scale integrated circuits from silicon wafers that are patterned by using x-ray lithography.

The consortium was set up by 11 domestic companies that are involved in semiconductor manufacturing and four universities. Members include Mitsubishi Electric Corporation, Tokyo Electron Ltd, Shin-Etsu Handotai Co Ltd, Tohoku University and Waseda University.

The consortium represents the first time that industry and academia have joined forces in a serious bid to make x-ray lithography a practical

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