Larger Shanghai facility ensures the highest level of customer service and resources to support rapidly growing market

BEVERLY, Mass. -- Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced the opening of its new, expanded national headquarters in Shanghai. The new facility gives Axcelis' rapidly growing customer base in China complete access to its industry-leading semiconductor manufacturing equipment, services and support. These resources include tool and applications expertise, spare and consumables parts management, productivity-enhancing upgrades, training and advanced process development.

"Axcelis has held a leadership position in China for more than two decades and has the largest installed base of ion implanters in the country," said Eric Hsu, vice president of Asia customer operations. "This success is based on our long-term commitment to excellence in serving China's booming semiconductor market. We expect our dramatic growth to continue, and our new, larger Shanghai facility will enable us to meet the needs of both our expanding customer base and our organization as it reaches out to new markets within China."

Last year Axcelis opened a major new Technology Center in Beijing, one of the fastest growing regions in China's burgeoning semiconductor industry. In addition to its operations in Beijing and Shanghai, Axcelis maintains a strong local presence in Zhangjiang, Tianjin, Suzhou and Wuxi. Axcelis also has facilities throughout the Asia-Pacific region, with direct offices in Taiwan, Korea, Singapore, Malaysia and Japan.

Axcelis representatives will be available to discuss the opening of the new Shanghai headquarters during SEMICON China, to be held March 21-23, 2007. At the exhibition, Axcelis will showcase its new single wafer Optima platform and the latest product addition, the Optima HD high dose implanter. The system covers all traditional and high dose implants and many mid dose applications for maximum versatility and capital efficiency. In addition, it supports molecular and hydrogen implants for emerging dual poly gate, USJ and SOI applications. Attendees can also see the company's leading-edge products designed to meet challenges of the 45nm era, including cleaning, curing and RTP technologies. Interested parties are invited to stop by the Axcelis booth, #4000 in Hall 4 at the Shanghai New International Expo Center, Shanghai, China.

Axcelis' new China headquarters is located at #666 Gubei Road, 12th Floor, Kirin Plaza Building, Chang-Ning District, Shanghai 200336.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis also licenses its 50% owned joint venture, SEN Corporation, an SHI and Axcelis Company, to manufacture and sell certain implant products in Japan. The company's Internet address is: www.axcelis.com.